東京都立大学の金子教授らによる研究成果が日本機械学会論文集に掲載されました
静電容量型ガスセンサの作製
− MoS2 ナノ粒子のインクジェットプリント応用 −
東京都公立大学法人 東京都立大学 システムデザイン学部 機械システム工学科 金子 新 教授は、トランスファプリントとインクジェットプリントを用いて静電容量変化型MEMS ガスセンサの作製に成功しました。
Abstract
A capacitive MEMS gas sensor is fabricated by transfer printing of Au thin film and inkjet printing of molybdenum disulfide (MoS2) nanoparticles. The transferred Au thin film is formed to be a comb electrode with a width of 100 μm and a thickness of 50 nm, and the comb-like Au electrode surface becomes hydrophilic by UV irradiation. The MoS2 particles are deposited on the comb-like Au electrode as a sensing element, where the applied voltage and the pulse width of the piezoelectric inkjet head are adjusted to make a drop velocity of 6 m/s. The UV irradiation helps the MoS2 particles to be deposited uniformly while suppressing undesired aggregation of the particles. The fabricated sensor composed of the comb-like Au electrode and the film of MoS2 particles is placed in a chamber for testing, and the capacitance is measured with exposure to ethanol gas. It is demonstrated that the capacitance increases with exposure to ethanol gas and subsequently decreases after air-exposure. It is reasonable that the capacitance change is due to the adhesion of ethanol gas molecules to the MoS2 particle film, and that the fabricated structure works as a capacitive MEMS gas sensor. It is also found that there are variations in response due to the surface morphologies of the MoS2 particle film.
A capacitive MEMS gas sensor is fabricated by transfer printing of Au thin film and inkjet printing of molybdenum disulfide (MoS2) nanoparticles. The transferred Au thin film is formed to be a comb electrode with a width of 100 μm and a thickness of 50 nm, and the comb-like Au electrode surface becomes hydrophilic by UV irradiation. The MoS2 particles are deposited on the comb-like Au electrode as a sensing element, where the applied voltage and the pulse width of the piezoelectric inkjet head are adjusted to make a drop velocity of 6 m/s. The UV irradiation helps the MoS2 particles to be deposited uniformly while suppressing undesired aggregation of the particles. The fabricated sensor composed of the comb-like Au electrode and the film of MoS2 particles is placed in a chamber for testing, and the capacitance is measured with exposure to ethanol gas. It is demonstrated that the capacitance increases with exposure to ethanol gas and subsequently decreases after air-exposure. It is reasonable that the capacitance change is due to the adhesion of ethanol gas molecules to the MoS2 particle film, and that the fabricated structure works as a capacitive MEMS gas sensor. It is also found that there are variations in response due to the surface morphologies of the MoS2 particle film.
掲載論文のご案内
この研究成果は、日本機械学会論文集に掲載されています。
日本機械学会論文集 掲載論文
論文情報
| タイトル | MoS2ナノ粒子のインクジェットプリントを応用した静電容量型ガスセンサの作製 |
|---|---|
| 掲載誌 | 日本機械学会論文集 2023 年 89 巻 928 号 p. 23-00158 |
| 著者 | 増田 拓己, 春日 祐人, 河野 貴裕, 金子 新 東京都立大学 システムデザイン研究科 |
| 掲載⽇ | 2023年12月25日 |
| DOI | 10.1299/transjsme.23-00158 |